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Epitaxial silicon technology / edited by B. Jayant Baliga.

Contributor(s): Material type: TextTextPublication details: Orlando : Academic Press, 1986.Description: viii, 328 p. : ill. ; 24 cmISBN:
  • 0120771209
Subject(s): DDC classification:
  • 621.3815/2 19
LOC classification:
  • TK7871.85 .E65 1986
Contents:
Silicon vapor phase epitaxy / H.M. Liaw and J.W. Rose -- Silicon molecular beam epitaxy / Subramanian S. Iyer -- Silicon liquid phase epitaxy / B. Jayant Baliga -- Silicon on sapphire heteroepitaxy / Prahalad K. Vasudev -- Silicon-on-insulator epitaxy / Hon Wai Lam.
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Holdings
Item type Current library Call number Copy number Status Barcode
Loan - Normal on open shelf Loan - Normal on open shelf UOE Main Library Open shelf TK7871.85 .E65 1986 (Browse shelf(Opens below)) 10018197 Available 10018197
Total holds: 0

Includes bibliographies and index.

Silicon vapor phase epitaxy / H.M. Liaw and J.W. Rose -- Silicon molecular beam epitaxy / Subramanian S. Iyer -- Silicon liquid phase epitaxy / B. Jayant Baliga -- Silicon on sapphire heteroepitaxy / Prahalad K. Vasudev -- Silicon-on-insulator epitaxy / Hon Wai Lam.

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