<?xml version="1.0" encoding="UTF-8"?>
<record
    xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"
    xsi:schemaLocation="http://www.loc.gov/MARC21/slim http://www.loc.gov/standards/marcxml/schema/MARC21slim.xsd"
    xmlns="http://www.loc.gov/MARC21/slim">

  <leader>00891nam a2200289   4500</leader>
  <controlfield tag="001">1090991</controlfield>
  <controlfield tag="005">20150901094910.0</controlfield>
  <controlfield tag="008">000</controlfield>
  <datafield tag="020" ind1=" " ind2=" ">
    <subfield code="a">012121740X</subfield>
  </datafield>
  <datafield tag="035" ind1=" " ind2=" ">
    <subfield code="a">(OCoLC)26302753</subfield>
  </datafield>
  <datafield tag="035" ind1=" " ind2=" ">
    <subfield code="a">(OCoLC)ocm26302753</subfield>
  </datafield>
  <datafield tag="035" ind1=" " ind2=" ">
    <subfield code="a">(CStRLIN)PATG92-B11653</subfield>
  </datafield>
  <datafield tag="035" ind1=" " ind2=" ">
    <subfield code="a">(NNC)1090991</subfield>
  </datafield>
  <datafield tag="040" ind1=" " ind2=" ">
    <subfield code="a">UOEL</subfield>
    <subfield code="c">UKM</subfield>
    <subfield code="d">IEN</subfield>
    <subfield code="d">CStRLIN</subfield>
    <subfield code="d">CStclI</subfield>
    <subfield code="d">PPT</subfield>
  </datafield>
  <datafield tag="050" ind1=" " ind2="4">
    <subfield code="a">QD8304</subfield>
    <subfield code="b">.P458 1992</subfield>
  </datafield>
  <datafield tag="082" ind1="1" ind2="4">
    <subfield code="a">621.36</subfield>
    <subfield code="2">12</subfield>
  </datafield>
  <datafield tag="245" ind1="0" ind2="0">
    <subfield code="a">Photochemical processing of electronic materials /</subfield>
    <subfield code="c">edited by Ian W. Boyd and Richard B. Jackman.</subfield>
  </datafield>
  <datafield tag="260" ind1=" " ind2=" ">
    <subfield code="a">London, England ;</subfield>
    <subfield code="a">San Diego :</subfield>
    <subfield code="b">Academic Press,</subfield>
    <subfield code="c">c1992.</subfield>
  </datafield>
  <datafield tag="300" ind1=" " ind2=" ">
    <subfield code="a">xvi, 532 p. :</subfield>
    <subfield code="b">ill. ;</subfield>
    <subfield code="c">23 cm.</subfield>
  </datafield>
  <datafield tag="504" ind1=" " ind2=" ">
    <subfield code="a">Includes bibliographical references and index.</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Photochemistry.</subfield>
    <subfield code="x">Chemistry</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Electronics</subfield>
    <subfield code="x">Materials.</subfield>
  </datafield>
  <datafield tag="700" ind1="1" ind2=" ">
    <subfield code="a">Boyd, Ian W.,</subfield>
    <subfield code="d">1958-</subfield>
  </datafield>
  <datafield tag="700" ind1="1" ind2=" ">
    <subfield code="a">Jackman, Richard B.</subfield>
  </datafield>
  <datafield tag="942" ind1=" " ind2=" ">
    <subfield code="2">lcc</subfield>
    <subfield code="c">LL</subfield>
  </datafield>
  <datafield tag="999" ind1=" " ind2=" ">
    <subfield code="c">4066</subfield>
    <subfield code="d">4066</subfield>
  </datafield>
  <datafield tag="952" ind1=" " ind2=" ">
    <subfield code="0">0</subfield>
    <subfield code="1">0</subfield>
    <subfield code="2">lcc</subfield>
    <subfield code="4">0</subfield>
    <subfield code="7">0</subfield>
    <subfield code="a">UOE</subfield>
    <subfield code="b">UOE</subfield>
    <subfield code="c">GEN</subfield>
    <subfield code="d">2015-04-08</subfield>
    <subfield code="l">0</subfield>
    <subfield code="o">TK8304 .P46 1992</subfield>
    <subfield code="p">10054701</subfield>
    <subfield code="r">2015-04-08 00:00:00</subfield>
    <subfield code="t">10054701</subfield>
    <subfield code="w">2015-04-08</subfield>
    <subfield code="y">LL</subfield>
  </datafield>
</record>
