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  <titleInfo>
    <title>Photochemical processing of electronic materials</title>
  </titleInfo>
  <name type="personal">
    <namePart>Boyd, Ian W.</namePart>
    <namePart type="date">1958-</namePart>
  </name>
  <name type="personal">
    <namePart>Jackman, Richard B.</namePart>
  </name>
  <typeOfResource>text</typeOfResource>
  <originInfo>
    <place>
      <placeTerm type="text">London, England</placeTerm>
    </place>
    <place>
      <placeTerm type="text">San Diego</placeTerm>
    </place>
    <publisher>Academic Press</publisher>
    <dateIssued>c1992</dateIssued>
    <issuance>monographic</issuance>
  </originInfo>
  <physicalDescription>
    <extent>xvi, 532 p. : ill. ; 23 cm.</extent>
  </physicalDescription>
  <note type="statement of responsibility">edited by Ian W. Boyd and Richard B. Jackman.</note>
  <note>Includes bibliographical references and index.</note>
  <subject authority="lcsh">
    <topic>Photochemistry</topic>
    <topic>Chemistry</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Electronics</topic>
    <topic>Materials</topic>
  </subject>
  <classification authority="lcc">QD8304 .P458 1992</classification>
  <classification authority="ddc" edition="12">621.36</classification>
  <identifier type="isbn">012121740X</identifier>
  <recordInfo>
    <recordContentSource authority="marcorg">UOEL</recordContentSource>
    <recordCreationDate encoding="marc">000</recordCreationDate>
    <recordChangeDate encoding="iso8601">20150901094910.0</recordChangeDate>
    <recordIdentifier>1090991</recordIdentifier>
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