TY  - BOOK
AU  - Boyd,Ian W.
AU  - Jackman,Richard B.
TI  - Photochemical processing of electronic materials
SN  - 012121740X
AV  - QD8304 .P458 1992
U1  - 621.36 12
PY  - 1992///
CY  - London, England, San Diego
PB  - Academic Press
KW  - Photochemistry
KW  - Chemistry
KW  - Electronics
KW  - Materials
N1  - Includes bibliographical references and index
ER  -