00926nam a2200277 4500 443707 20150410112103.0 000 82013748 0126747806 UOEL DLC DLC TP156.V3 S78 1983 621.5/5 19 Stuart, R. V. Vacuum technology, thin films, and sputtering : an introduction / R.V. Stuart. New York : Academic Press, 1983. viii, 151 p. : ill. ; 24 cm. Includes index. Vacuum technology. Chemical technology Thin films. Cathode sputtering (Plating process) Publisher description http://www.loc.gov/catdir/description/els032/82013748.html Table of contents http://www.loc.gov/catdir/toc/els031/82013748.html 7 cbc orignew 1 ocip 19 y-gencatlg lcc LL 4552 4552 0 0 lcc 0 0 UOE UOE GEN 2015-04-10 0 TP156.V3 S78 1983 10052742 2015-04-10 00:00:00 10052742 2015-04-10 LL