an introduction Stuart, R. V. creator text New York Academic Press 1983 monographic viii, 151 p. : ill. ; 24 cm. R.V. Stuart. Includes index. Vacuum technology Chemical technology Thin films Cathode sputtering (Plating process) TP156.V3 S78 1983 621.5/5 0126747806 82013748 http://www.loc.gov/catdir/description/els032/82013748.html http://www.loc.gov/catdir/toc/els031/82013748.html http://www.loc.gov/catdir/description/els032/82013748.html http://www.loc.gov/catdir/toc/els031/82013748.html UOEL 000 20150410112103.0 443707