Etching of III-V semiconductors
an electrochemical approach
Etching of 3-5 semiconductors
Notten, P. H. L. (Peter H. L.)
creator
Meerakker, J. E. A. M. van den (Jan E. A. M.)
Kelly, J. J. (John J.)
text
Oxford, UK
New York, NY, USA
Elsevier Advanced Technology
Distributed in the USA and Canada by Elsevier Science Pub. Co.
c1991
monographic
xiv, 349 p. : ill. ; 25 cm.
P.H.L. Notten, J.E.A.M. van den Meerakker, J.J. Kelly.
Includes bibliographical references and indexes.
Semiconductors
Etching
Electrochemistry
TK7871.85 .N674 1990
621.381/52
0946395845
90042266
UOEL
000
20150420114454.0
3416755