TY  - BOOK
AU  - Delcher,T.A
TI  - Vacuum Physics and Techniques
SN  - 0412465906
AV  - QC166 .D451993
PY  - 1993///
CY  - London
PB  - Chapman and Hill 
KW  - Physics
KW  - physics and its applications
N1  - Includes index
ER  -